✦ LIBER ✦
Properties of polycrystalline silicon prepared by chemical transport in hydrogen plasma at temperatures between 80 and 400 degrees C
✍ Scribed by Veprek, S; Iqbal, Z; Oswald, H R; Webb, A P
- Book ID
- 121090876
- Publisher
- Institute of Physics
- Year
- 1981
- Tongue
- English
- Weight
- 954 KB
- Volume
- 14
- Category
- Article
- ISSN
- 0022-3719
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