Properties of n+ and p+ polysilicon thin films fabricated by an excimer laser-activated spin-on dopant technique

✍ Scribed by E.A. Al-Nuaimy; J.M. Marshall; S. Muhl

• Book ID: 117148971
• Publisher: Elsevier Science
• Year: 1998
• Tongue: English
• Weight: 114 KB
• Volume: 227-230
• Category: Article
• ISSN: 0022-3093
• DOI: 10.1016/s0022-3093(98)00262-2