Properties of [Mg 2 (thd) 4 ] as a Precursor for Atomic Layer Deposition of MgO Thin Films and Crystal Structures of [Mg 2 (thd) 4 ] and [Mg(thd) 2 (EtOH) 2 ]

✍ Scribed by Hatanpää, Timo; Ihanus, Jarkko; Kansikas, Jarno; Mutikainen, Ilpo; Ritala, Mikko; Leskelä, Markku

• Book ID: 120323790
• Publisher: American Chemical Society
• Year: 1999
• Tongue: English
• Weight: 161 KB
• Volume: 11
• Category: Article
• ISSN: 0897-4756
• DOI: 10.1021/cm991008e