✦ LIBER ✦
Properties of low pressure CVD tungsten silicide as related to IC process requirements : D. L. Brors, J. A. Fair, K. A. Monnig and K. C. Saraswat. Solid St. Technol., 183 (April 1983)
- Publisher
- Elsevier Science
- Year
- 1984
- Tongue
- English
- Weight
- 129 KB
- Volume
- 24
- Category
- Article
- ISSN
- 0026-2714
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