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Properties of laser pulse deposited oxide films

✍ Scribed by G. Reiße; B. Keiper; S. Weißmantel; H. Johansen; R. Scholz; T. Martini


Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
654 KB
Volume
241
Category
Article
ISSN
0040-6090

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Ultrasmooth Gold Films via Pulsed Laser
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## Abstract A simple, one step technique for depositing ultrasmooth gold films using pulsed laser deposition is demonstrated by optimizing process para­meters. The smoothest film having a root‐mean‐square roughness of 0.17 nm (including the substrate roughness of 0.11 nm) for a 35 nm thick film on