✦ LIBER ✦

Properties of large area diamond membranes for X ray lithography

✍ Scribed by Henry Windischmann; Glenn F. Epps; Gerald P. Ceasar

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Status of diamond as membrane material f

✍ Ravet, M.F.; Rousseaux, F. 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 843 KB

V-2 generation of high-resolution large-

✍ Maydan, D.; Coquin, G.A.; Maldonado, J.R.; Somekh, S.R.; Taylor, G.N.; Lenzo, P. 📂 Article 📅 1974 🏛 IEEE 🌐 English ⚖ 183 KB

High speed replication of submicron feat

✍ Maydan, D.; Coquin, G.A.; Maldonado, J.R.; Somekh, S.; Lou, D.Y.; Taylor, G.N. 📂 Article 📅 1975 🏛 IEEE 🌐 English ⚖ 768 KB

Optimized source for x-ray lithography o

📂 Article 📅 1976 🏛 Elsevier Science 🌐 English ⚖ 148 KB

Simulation of electron-scattering proper

✍ Messina, G.; Santangelo, S.; Paoletti, A.; Tucciarone, A. 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 403 KB

X-ray source for irradiation of large-ar

✍ V. K. Petin; S. V. Shljakhtun; V. I. Oreshkin; N. A. Ratakhin 📂 Article 📅 2008 🏛 Springer 🌐 English ⚖ 335 KB