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Properties of insulating thin films deposited by R. F. sputtering : W. A. Pliskin, P. D. Davidse, H. S. Lehman and L. I. Maissel, IBM J., July (1967), p. 461


Publisher
Elsevier Science
Year
1968
Tongue
English
Weight
97 KB
Volume
7
Category
Article
ISSN
0026-2714

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