Properties of high-k Ti1−xSixO2 gate dielectric layers prepared at room temperature

✍ Scribed by Sungyeon Kim; Moon-Ho Ham; Jae-Woong Lee; Woong Lee; Jae-Min Myoung

• Publisher: Elsevier Science
• Year: 2008
• Tongue: English
• Weight: 680 KB
• Volume: 254
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2007.12.013