✦ LIBER ✦
Properties of heavily phosphorous-doped μc-Si deposited by mesh attached cathode-type r.f. glow discharge
✍ Scribed by Ahalapitiya Hewage Jayatissa; Yoshinori Hatanaka; Yoichiro Nakanishi; Tomuo Yamaguchi
- Publisher
- Elsevier Science
- Year
- 1996
- Tongue
- English
- Weight
- 733 KB
- Volume
- 274
- Category
- Article
- ISSN
- 0040-6090
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