Friction and wear properties of carbon c
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A. Mitsuo; K. Morikawa; M. Kawaguchi; S. Aoki; H. Suzuki
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Article
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2009
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Elsevier Science
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English
โ 568 KB
Carbon films were deposited on high-speed tool steel substrates under 20 keV of bias voltage, 1 Pa of gas pressure and for 2 h of process time by plasma immersion ion implantation (PIII). Pre-implantation with nitrogen, methane or acethylene was also carried out. In order to investigate the substrat