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Properties of broadband depth-graded multilayer mirrors for EUV optical systems

✍ Scribed by Yakshin, A. E.; Kozhevnikov, I. V.; Zoethout, E.; Louis, E.; Bijkerk, F.


Book ID
115413118
Publisher
Optical Society of America
Year
2010
Tongue
English
Weight
743 KB
Volume
18
Category
Article
ISSN
1094-4087

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