Properties of aluminium nitride coating obtained by vacuum arc discharge method with plasma flow separation

✍ Scribed by Inkin, V.N; Kirpilenko, G.G; Kolpakov, A.J

• Book ID: 121719711
• Publisher: Elsevier Science
• Year: 2001
• Tongue: English
• Weight: 253 KB
• Volume: 10
• Category: Article
• ISSN: 0925-9635
• DOI: 10.1016/s0925-9635(00)00577-x