✦ LIBER ✦
Properties and applications of electron cyclotron plasma deposited SiOxNy films with graded refractive index profiles
✍ Scribed by Pavel V. Bulkin; Pieter L. Swart; Beatrys M. Lacquet
- Book ID
- 115990402
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 303 KB
- Volume
- 187
- Category
- Article
- ISSN
- 0022-3093
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