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Properties analysis of Mn-doped ZnO piezoelectric films

✍ Scribed by Jing Wang; Wen Chen; Minrui Wang


Book ID
116600372
Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
426 KB
Volume
449
Category
Article
ISSN
0925-8388

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## Abstract Study of optical and electrical properties of Mn doped ZnO films deposited by atmospheric barrier torch discharge technique on SiO~2~ substrates is reported for a wide range of Mn concentration (0.2–20 at.%). It was found that the growth of all Mn‐doped ZnO films contains secondary Mn~2