Promoting emitter diffusion process and optimization of vertical profiles for high-speed SiGe HBT/BiCMOS

✍ Scribed by Miura, M.; Shimamoto, H.; Hayami, R.; Kodama, A.; Tominari, T.; Hashimoto, T.; Washio, K.

• Book ID: 114618193
• Publisher: IEEE
• Year: 2006
• Tongue: English
• Weight: 399 KB
• Volume: 53
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/ted.2006.871169