✦ LIBER ✦
Projection lithography to print thick resist patterns with triangular and semi-circular cross-section profiles
✍ Scribed by Toshiyuki Horiuchi; Takashi Kashiwagi
- Book ID
- 104052578
- Publisher
- Elsevier Science
- Year
- 2010
- Tongue
- English
- Weight
- 689 KB
- Volume
- 87
- Category
- Article
- ISSN
- 0167-9317
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