✦ LIBER ✦
Projecting deep-subwavelength patterns from diffraction-limited masks using metal-dielectric multilayers
✍ Scribed by Xiong, Yi; Liu, Zhaowei; Zhang, Xiang
- Book ID
- 118748187
- Publisher
- American Institute of Physics
- Year
- 2008
- Tongue
- English
- Weight
- 526 KB
- Volume
- 93
- Category
- Article
- ISSN
- 0003-6951
No coin nor oath required. For personal study only.