✦ LIBER ✦
Progress in Surface Passivation of Heavily Doped n-Type and p-Type Silicon by Plasma-Deposited AlO $_{\bm x}$/SiN$_{\bm x}$ Dielectric Stacks
✍ Scribed by Duttagupta, Shubham; Ma, Fa-Jun; Lin, Serena Fen; Mueller, Thomas; Aberle, Armin G.; Hoex, Bram
- Book ID
- 121836456
- Publisher
- Institute of Electrical and Electronics Engineers
- Year
- 2013
- Tongue
- English
- Weight
- 523 KB
- Volume
- 3
- Category
- Article
- ISSN
- 2156-3381
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