Profilometry with compact single-shot low-coherence time-domain interferometry
✍ Scribed by Molly Subhash Hrebesh; Yuuki Watanabe; Manabu Sato
- Book ID
- 103873808
- Publisher
- Elsevier Science
- Year
- 2008
- Tongue
- English
- Weight
- 872 KB
- Volume
- 281
- Category
- Article
- ISSN
- 0030-4018
No coin nor oath required. For personal study only.
✦ Synopsis
We describe the performance of a compact single-shot low-coherence interferometric scheme that can be capable of measuring three-dimensional surface profiles and shape. This technique utilizes a polarizing Michelson interferometer and a four-channel polarization phase-stepper optics, which is based on a paired wedge prism, a combined wave plate and a Wollaston prism. The coherence gated surface image can be calculated by the simultaneous acquisition of two interferograms and a DC image on a single CCD camera. The image calculation is based on a novel algorithm to calibrate the imbalanced intensity as well as the deviated arbitrary relative phase of each of the imaging channels. The system can display the transverse cross-sectional images in real-time. To demonstrate the feasibility of this system, a Japanese coin is presented as a 3-D shape measurement example with an image size of 4 mm (horizontal) Â 4 mm (vertical) Â 160 lm (depth).