Profiling of carbon, oxygen and argon contamination in sputter-deposited films using nuclear backscattering and nuclear reaction spectroscopy

✍ Scribed by A. Chevarier; N. Chevarier; M. El Bouanani; E. Gerlic; M. Stern; B. Roux; F. Thimon

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 322 KB
• Volume: 48-49
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/0169-4332(91)90333-f