✦ LIBER ✦
Profile of Al etch rate estimated from the analysis of 3-D rarefied flow of Cl2, BCl3, and AlCl3 in a commercial etcher
✍ Scribed by VV Serikov; S Kurisawa; K Nanbu
- Book ID
- 107869012
- Publisher
- Elsevier Science
- Year
- 1996
- Tongue
- English
- Weight
- 350 KB
- Volume
- 47
- Category
- Article
- ISSN
- 0042-207X
No coin nor oath required. For personal study only.