Production scale electron-beam systems for thin-film applications : W. G. Overacker. J. Vac. Sci. Technol. 8(1), January–February (1971), p. 357

• Publisher: Elsevier Science
• Year: 1972
• Tongue: English
• Weight: 166 KB
• Volume: 11
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(72)90575-6