Production of β-SiC buffer layers for CVD diamond thin films by ion implantation

✍ Scribed by von Münch, W.; Wiebach, S.

• Book ID: 122538369
• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 718 KB
• Volume: 3
• Category: Article
• ISSN: 0925-9635
• DOI: 10.1016/0925-9635(94)90211-9