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Production of YBa2Cu3O7−xsuperconducting thin films by pulsed pseudospark electron beam evaporation

✍ Scribed by H. P. Schölch; P. Fickenscher; T. Redel; M. Stetter; G. Saemann-Ischenko; W. Benker; W. Hartmann; K. Frank; J. Christiansen


Publisher
Springer
Year
1989
Tongue
English
Weight
291 KB
Volume
48
Category
Article
ISSN
1432-0630

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Preparation of YBa2Cu3O7−x thin films by
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Superconducting YBa2Cu307\_ x (YBCO) thin films on MgO (100) substrates were successfully fabricated by a reactive evaporation method under oxygen plasma conditions. In this paper, details of the reactive evaporation method and the optimum preparation conditions are described. The superconducting tr