Production of sputtering target by powder metallurgy processing using FeAlSi gas-atomized powder

✍ Scribed by A. Yanagitani; M. Murakami; K. Yanagimoto; Y. Tanaka

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 731 KB
• Volume: 133
• Category: Article
• ISSN: 0921-5093
• DOI: 10.1016/0921-5093(91)90162-g