✦ LIBER ✦
Production of Si+ and Cl+ ion beams from a Freeman type ion source using low toxicity and non-corrosive vapours as source gas
✍ Scribed by L.S. Wielunski; G.D. Paterson; J.M. Bell; R.E. Clegg
- Book ID
- 114167826
- Publisher
- Elsevier Science
- Year
- 2004
- Tongue
- English
- Weight
- 267 KB
- Volume
- 215
- Category
- Article
- ISSN
- 0168-583X
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