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Production of negative ions of oxygen and fluorine from solid cones of a sputter source without using gases

✍ Scribed by Yoshihumi Higashi; Hidenori Yamaguchi; Mikio Yamanouchi

Publisher: Elsevier Science
Year: 1980
Weight: 159 KB
Volume: 178
Category: Article
ISSN: 0029-554X
DOI: 10.1016/0029-554x(80)90878-2

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