Production of carbon-nitrogen coatings modified by titanium nitride
β Scribed by V. A. Beloshenko; V. N. Varyukhin; B. E. Shkuratov
- Book ID
- 110139453
- Publisher
- Springer
- Year
- 2004
- Tongue
- English
- Weight
- 95 KB
- Volume
- 49
- Category
- Article
- ISSN
- 1063-7842
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Carbon nitride materials have been of great interests to the scientific community due to their unique properties such as extreme hardness, low density, chemical inertness, biocompatibility, etc. According to theoretical calculations published elsewhere, some covalent carbon-nitrogen compounds (e.g
## Abstract A magnetically driven carbonβshunting arc discharge was generated in nitrogen gas circumstance and amorphous carbon nitride (aβCN__~x~__) films were prepared. A silicon substrate was immersed into the plasma, and a series of pulse voltage was applied to the substrate synchronizing with