✦ LIBER ✦
Production of a TiN film with nanoscale particle size by a combined method of plasma-alloy reaction and spray deposition
✍ Scribed by A. Inoue; B. G. Kim; K. Nosaki; T. Yamaguchi; T. Masumoto
- Publisher
- Springer
- Year
- 1992
- Tongue
- English
- Weight
- 848 KB
- Volume
- 11
- Category
- Article
- ISSN
- 0261-8028
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