A new type of cluster ion beam system using organic liquid materials such as ethanol has been developed, and it has several advantages for surface etching and chemical modification based on the different properties of liquid cluster ions. Ethanol vapors were ejected through a nozzle into a high-vacu
✦ LIBER ✦
Production and irradiation of ionic liquid cluster ions
✍ Scribed by Takaoka, Gikan H.; Takeuchi, Mitsuaki; Ryuto, Hiromichi; Ueda, Ryo
- Book ID
- 122823922
- Publisher
- Elsevier Science
- Year
- 2013
- Tongue
- English
- Weight
- 615 KB
- Volume
- 307
- Category
- Article
- ISSN
- 0168-583X
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