Wear-corrosion performance of Si-DLC coa
✍
Jung-Gu Kim; Kwang-Ryeol Lee; Seok-Jo Yang
📂
Article
📅
2008
🏛
John Wiley and Sons
🌐
English
⚖ 444 KB
👁 2 views
## Abstract Si‐incorporated diamond‐like carbon (Si‐DLC) coatings ranging from 0 to 2 at % Si were deposited on Ti‐alloy substrate by means of radio frequency plasma‐assisted chemical vapor deposition (r.f. PACVD) technique, using a mixture of benzene (C~6~H~6~) and silane (SiH~4~) as the reaction