Product review

• Book ID: 104266217
• Publisher: Elsevier Science
• Year: 1999
• Tongue: English
• Weight: 101 KB
• Volume: 53
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/s0042-207x(98)00358-3

✦ Synopsis

The dynamic flow method UHV standard apparatus developed by LIP is an absolute vacuum standard for vacuum gauge calibration. It is composed of a calibration system, a flowmeter and a pumping system. The calibration system is a four-sphere structure, and the diameter of the calibration chamber is 500 mm, the ultimate vacuum is 6.5;10\ Pa, the calibration range is from 10\ to 10\ Pa and the uncertainty amounts to 3% from 10\ to 10\ Pa and increases to 10% in 10\ Pa.