✦ LIBER ✦
Processing parameters for the diffusion redistribution of boron and phosphorus implanted in silicon : Vladimir Rybka and Frantisek Cerny. TESLA Electronics2/'78, 56
- Publisher
- Elsevier Science
- Year
- 1978
- Tongue
- English
- Weight
- 64 KB
- Volume
- 18
- Category
- Article
- ISSN
- 0026-2714
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