✦ LIBER ✦
Process optimization of polymetal (W/WN/Polysilicon) gate and its impact on dynamic random-access memory chip performance in 0.14-µm technology
✍ Scribed by Pil Bo Shim; Jun-Ho Choy; Gyung Sun Gil; Ki Myung Kyung; Ju Cheol Park
- Book ID
- 107452731
- Publisher
- Springer US
- Year
- 2002
- Tongue
- English
- Weight
- 891 KB
- Volume
- 31
- Category
- Article
- ISSN
- 0361-5235
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