𝔖 Bobbio Scriptorium
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Process Optimization by Means of a Computerized Process Simulation Model in Cardiac Surgery

✍ Scribed by Dr. med. Richard Feyrer MBA, Udo Kunzmann…

Book ID
120841544
Publisher
Adis International Limited (now part of Wolters Kluwer Health)
Year
2006
Tongue
English
Weight
144 KB
Volume
14
Category
Article
ISSN
1173-8790

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A hybrid model combining simulation and
A hybrid model combining simulation and optimization in chemical mechanical polishing process
✍ Yeou-Yih Lin; Ship-Peng Lo; Sheng-Li Lin; Jinn-Tong Chiu 📂 Article 📅 2008 🏛 Elsevier Science 🌐 English ⚖ 729 KB

A hybrid model composing of 2D axisymmetric quasic-static finite element method, backpropagation network, and direct complex searching optimization for chemical mechanical polishing process (CMP) was established to investigate the optimal parameter sets under the minimum nonuniformity (NU) on wafer