Interstitial diffusion under conditions
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O.I. Velichko; Yu.P. Shaman
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Article
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2010
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Elsevier Science
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English
โ 302 KB
The diffusion equation for nonequilibrium interstitial impurity atoms in the form convenient for numerical solution has been obtained. The proposed equation takes into account all different charge states of interstitial atoms and drift of all mobile charged species in the built-in electric field, al