✦ LIBER ✦
Process modeling of phosphorus diffusion in silicon—a new model : G. Eranna and D. Kakati. Solid St. Technol. 116 (December 1984)
- Publisher
- Elsevier Science
- Year
- 1985
- Tongue
- English
- Weight
- 133 KB
- Volume
- 25
- Category
- Article
- ISSN
- 0026-2714
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