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Process effects on structural properties of TiO2 thin films by reactive sputtering

✍ Scribed by Wicaksana, Dwi

Book ID: 126815976
Publisher: AVS (American Vacuum Society)
Year: 1992
Tongue: English
Weight: 742 KB
Volume: 10
Category: Article
ISSN: 0734-2101
DOI: 10.1116/1.578269

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