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Process development of precision surface micro-machining using mechanical abrasion and chemical etching

✍ Scribed by J.-M. Lee; I.-H. Sung; D.-E. Kim

Book ID: 106184513
Publisher: Springer-Verlag
Year: 2002
Tongue: English
Weight: 297 KB
Volume: 8
Category: Article
ISSN: 0946-7076
DOI: 10.1007/s00542-002-0193-7

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