✦ LIBER ✦
Process characterization and statistical analysis of oxide CMP on a silicon wafer with sparse data
✍ Scribed by S.T.S. Bukkapatnam; P.K. Rao; W.-C. Lih; N. Chandrasekaran; R. Komanduri
- Publisher
- Springer
- Year
- 2007
- Tongue
- English
- Weight
- 595 KB
- Volume
- 88
- Category
- Article
- ISSN
- 1432-0630
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