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Process chain for serial manufacture of 3D micro- and nano-scale structures

✍ Scribed by V. Velkova; G. Lalev; H. Hirshy; F. Omar; S. Scholz; E. Minev; S. Dimov

Book ID: 118430302
Publisher: Elsevier
Year: 2011
Tongue: English
Weight: 808 KB
Volume: 4
Category: Article
ISSN: 1755-5817
DOI: 10.1016/j.cirpj.2011.03.005

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