✦ LIBER ✦
Process and film characterization of PECVD borophos-phosilicate films for VLSI applications : Jerry E. Tong, Kurt Schertenleib and Ronald A. Carpio. Solid St. Technol. 161 (January 1984)
- Publisher
- Elsevier Science
- Year
- 1984
- Tongue
- English
- Weight
- 133 KB
- Volume
- 24
- Category
- Article
- ISSN
- 0026-2714
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