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Proceedings of the tenth annual meeting of the florida society for electron microscopy held at Crystal River, Florida, March 4–6, 1992


Publisher
John Wiley and Sons
Year
1992
Tongue
English
Weight
386 KB
Volume
22
Category
Article
ISSN
1059-910X

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✦ Synopsis


. ECR assisted deposition of boron nitride for use as barrier layers in thermal storage batteries. A specially designed Electron Cyclotron Resonant (ECR) plasma-assisted deposition system utilizing the magnetic mirror configuration has been used to deposit Boron Nitride on thermal battery components. The candidate system used in this study i s the molybdenurn/germanium


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