Problems and basic research directions in the field of thin-film nanoand microelectromechanical systems of pressure sensors

✍ Scribed by E. M. Belozubov; V. A. Vasil’ev; N. V. Gromkov

• Book ID: 110153318
• Publisher: SP MAIK Nauka/Interperiodica
• Year: 2011
• Tongue: English
• Weight: 328 KB
• Volume: 72
• Category: Article
• ISSN: 0005-1179
• DOI: 10.1134/s0005117911020184