Problem-oriented modeling of microtransducers: State of the art and future challenges

✍ Scribed by Gerhard Wachutka

• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 635 KB
• Volume: 41
• Category: Article
• ISSN: 0924-4247
• DOI: 10.1016/0924-4247(94)80124-x

✦ Synopsis

The development and productlon of well-performmg and inexpensive mlcrosensors, actuators or complete mlcrosystems are largely determined by mtncate trade-off conslderatlons Optimum performance requires a judicrous design based on a detaded understanding of the physical phenomena which govern the operation of single system components as well as their cooperation To this purpose, modehng and numerical slmulatlon are regarded as mcreasmgly useful or even as mdtspensable Problem-onented modehng does not only reduce the number of costly and tlme-consummg expenmental trial-and-error steps, but It also lends umque mslght mto the mtenor of a mmlaturlzed device showmg the dzstnbutlons of vanous phyacal quantities which are not readdy accessible to experiments Future work has mostly to concentrate on a user-fnendly modular 'CAD tool box' based on the concepts of 'tailored modehng This implies not only modem flexible software technrques and highly efficient computatlonal methods, but m particular new methodolo@es for fast and rehable model vahdatlon and the avadabdlty of a process-oriented material-property data base