✦ LIBER ✦
Principles of Meniscus-Based MEMS Gas or Liquid Pressure Sensors
✍ Scribed by Suter, Jonathan D.; Hohimer, Cameron J.; Fricke, Jacob M.; Christ, Josef; Kim, Hanseup; Evans, Allan T.
- Book ID
- 120447763
- Publisher
- IEEE
- Year
- 2013
- Tongue
- English
- Weight
- 765 KB
- Volume
- 22
- Category
- Article
- ISSN
- 1057-7157
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