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Primary recoil contribution to low energy light ion sputtering

✍ Scribed by U. Littmark; S. Fedder


Publisher
Elsevier Science
Year
1982
Weight
294 KB
Volume
194
Category
Article
ISSN
0167-5087

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Along with use for stripping and timing of high energy ions in accelerator experiments, ultra-thin DLC foils are being successfully applied to the instrumentation for fusion and space plasma research. In the latter case, the foils are exposed to light ions and neutral atoms in the keV energy range.