Primary reaction processes in the deposition of diamond-like carbon films by photon-enhanced CVD of methane using a windowless hydrogen lamp

✍ Scribed by White, A.J.; Milne, W.I.

• Book ID: 122923499
• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 295 KB
• Volume: 3
• Category: Article
• ISSN: 0925-9635
• DOI: 10.1016/0925-9635(94)90206-2