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Unaxis Wafer Processing has launched two production tools, the Versaline and the LLS EVO II. Built on a decade of dry etching system experience, Versaline is a modular system that enables etching and deposition technologies. Its ICP, RIE, PECVD and PVD modules provide solutions for applications such as LEDs, HBTs, HEMTs and MEMS. LLS EVO II is a batch sputtering system, with five sources, each configurable for sputtering options including DC, RF, RF/DC, pulsed DC, and co-sputtering.
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Dow Corning Corp has formed Compound Semiconductor Solutions (CSS), a new business to serve the wide band gap semiconductor industry. Located in Midland, MI, CCS incorporates Dow's many years of in-house and academic research investment, plus the recent acquisitions of business and technology assets
However, research director Lance Wilson is cautious:"The shape of the industry five years hence will depend on two critical shorter-term questions.At the manufacturing level, will the introduction of gallium nitride and silicon carbide as basic materials for the fabrication of RF power semiconductor