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Prevention of Photoresist Pattern Collapse by Using Liquid Carbon Dioxide

✍ Scribed by Jincao, Ye; Matthews, Michael A.; Darvin, Charles H.

Book ID: 127069574
Publisher: American Chemical Society
Year: 2001
Tongue: English
Weight: 42 KB
Volume: 40
Category: Article
ISSN: 0888-5885
DOI: 10.1021/ie010424h

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